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layer update, adding doping, synchronizing with GSiP
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@lukasc-ubc
lukasc-ubc committed Sep 11, 2018
1 parent 66168db commit 10a42c6
Showing 1 changed file with 88 additions and 35 deletions.
123 changes: 88 additions & 35 deletions klayout_dot_config/tech/EBeam/klayout_Layers_EBeam.lyp
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Original file line number Diff line number Diff line change
Expand Up @@ -5,7 +5,7 @@
<fill-color>#ff80a8</fill-color>
<frame-brightness>0</frame-brightness>
<fill-brightness>0</fill-brightness>
<dither-pattern>I4</dither-pattern>
<dither-pattern>I6</dither-pattern>
<valid>true</valid>
<visible>true</visible>
<transparent>true</transparent>
Expand All @@ -14,6 +14,22 @@
<animation>0</animation>
<name>Si</name>
<source>1/0@1</source>
<width>2.0</width>
</properties>
<properties>
<frame-color>#ff0000</frame-color>
<fill-color>#ff0000</fill-color>
<frame-brightness>0</frame-brightness>
<fill-brightness>0</fill-brightness>
<dither-pattern>I9</dither-pattern>
<valid>true</valid>
<visible>true</visible>
<transparent>false</transparent>
<width>1</width>
<marked>false</marked>
<animation>0</animation>
<name>31_Si_p6nm</name>
<source>31/0@1</source>
</properties>
<properties>
<frame-color>#0000ff</frame-color>
Expand All @@ -29,6 +45,37 @@
<animation>0</animation>
<name>Text</name>
<source>10/0@1</source>
</properties>
<properties>
<animation>0</animation>
<marked>false</marked>
<source>20/0@1</source>
<name>Si N</name>
<visible>true</visible>
<dither-pattern>I6</dither-pattern>
<frame-color>#000000</frame-color>
<fill-color>#7000FF</fill-color>
<frame-brightness>0</frame-brightness>
<transparent>false</transparent>
<width>0.0</width>
<fill-brightness>0</fill-brightness>
</properties>
<properties>
<frame-color>#0000ff</frame-color>
<fill-color>#0000ff</fill-color>
<frame-brightness>0</frame-brightness>
<fill-brightness>0</fill-brightness>
<dither-pattern>I2</dither-pattern>
<line-style/>
<valid>true</valid>
<visible>true</visible>
<transparent>false</transparent>
<width/>
<marked>false</marked>
<xfill>false</xfill>
<animation>0</animation>
<name>Si N++</name>
<source>24/0@1</source>
</properties>
<properties>
<frame-color>#ff00ff</frame-color>
Expand All @@ -46,94 +93,100 @@
<source>26/0@1</source>
</properties>
<properties>
<frame-color>#ff0000</frame-color>
<fill-color>#ff0000</fill-color>
<frame-color>#805000</frame-color>
<fill-color>#805000</fill-color>
<frame-brightness>0</frame-brightness>
<fill-brightness>0</fill-brightness>
<dither-pattern>I9</dither-pattern>
<dither-pattern>I5</dither-pattern>
<valid>true</valid>
<visible>true</visible>
<transparent>false</transparent>
<width>1</width>
<width/>
<marked>false</marked>
<animation>0</animation>
<name>31_Si_p6nm</name>
<source>31/0@1</source>
<name>M1</name>
<source>11/0@1</source>
</properties>
<properties>
<frame-color>#ff0080</frame-color>
<fill-color>#ff0080</fill-color>
<frame-color>#008000</frame-color>
<fill-color>#008000</fill-color>
<frame-brightness>0</frame-brightness>
<fill-brightness>0</fill-brightness>
<dither-pattern>I4</dither-pattern>
<dither-pattern>I9</dither-pattern>
<valid>true</valid>
<visible>true</visible>
<transparent>false</transparent>
<width>1</width>
<width/>
<marked>false</marked>
<animation>0</animation>
<name>32_Si_p4nm</name>
<source>32/0@1</source>
<name>12_M2</name>
<source>12/0@1</source>
</properties>
<properties>
<frame-color>#ff80a8</frame-color>
<fill-color>#ff80a8</fill-color>
<frame-color>#008000</frame-color>
<fill-color>#008000</fill-color>
<frame-brightness>0</frame-brightness>
<fill-brightness>0</fill-brightness>
<dither-pattern>I9</dither-pattern>
<dither-pattern>I7</dither-pattern>
<valid>true</valid>
<visible>true</visible>
<transparent>false</transparent>
<width>1</width>
<width/>
<marked>false</marked>
<animation>0</animation>
<name>33_Si_p2nm</name>
<source>33/0@1</source>
<name>13_MLopen</name>
<source>13/0@1</source>
</properties>
<properties>
<frame-color>#805000</frame-color>
<fill-color>#805000</fill-color>
<frame-color>#8086ff</frame-color>
<fill-color>#8086ff</fill-color>
<frame-brightness>0</frame-brightness>
<fill-brightness>0</fill-brightness>
<dither-pattern>I5</dither-pattern>
<dither-pattern>I17</dither-pattern>
<line-style/>
<valid>true</valid>
<visible>true</visible>
<transparent>false</transparent>
<width/>
<marked>false</marked>
<xfill>false</xfill>
<animation>0</animation>
<name>M1</name>
<source>11/0@1</source>
<name>VC</name>
<source>40/0@1</source>
</properties>
<properties>
<frame-color>#008000</frame-color>
<fill-color>#008000</fill-color>
<frame-color>#80a8ff</frame-color>
<fill-color>#80a8ff</fill-color>
<frame-brightness>0</frame-brightness>
<fill-brightness>0</fill-brightness>
<dither-pattern>I9</dither-pattern>
<dither-pattern>I15</dither-pattern>
<line-style/>
<valid>true</valid>
<visible>true</visible>
<transparent>false</transparent>
<width/>
<width>2.0</width>
<marked>false</marked>
<xfill>false</xfill>
<animation>0</animation>
<name>12_M2</name>
<source>12/0@1</source>
<name>M1</name>
<source>41/0@1</source>
</properties>
<properties>
<frame-color>#008000</frame-color>
<fill-color>#008000</fill-color>
<frame-color>#0080ff</frame-color>
<fill-color>#0080ff</fill-color>
<frame-brightness>0</frame-brightness>
<fill-brightness>0</fill-brightness>
<dither-pattern>I7</dither-pattern>
<dither-pattern>I5</dither-pattern>
<line-style/>
<valid>true</valid>
<visible>true</visible>
<transparent>false</transparent>
<width/>
<marked>false</marked>
<xfill>false</xfill>
<animation>0</animation>
<name>13_MLopen</name>
<source>13/0@1</source>
<name>M Heater</name>
<source>47/0@1</source>
</properties>
<properties>
<frame-color>#8000ff</frame-color>
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2 comments on commit 10a42c6

@mustafacc
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Now there's doping and additional metal layers in the EBeam process?

@lukasc-ubc
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@lukasc-ubc lukasc-ubc commented on 10a42c6 Sep 12, 2018 via email

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